ETM/HAX Capsule

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ETMHAX capsule filters feature a single-layer Polytetrafluoroethylene (PTFE) membrane designed to deliver a higher filtration area and flow rate than standard ETM filters. Engineered for high-performance use in electronics and high-purity chemical industries, ETMHAX filters are chemically resistant and highly effective at removing fine particles from gases and non-aqueous liquids. These filters are most commonly used as point-of-use final filters, such as at tools or dispense points. ETMHAX filters are available in pore sizes from 0.05 to 5.0 μm, with optional pre-wetted configurations for aqueous compatibility. Every filter is individually integrity tested to ensure performance.

Key Features:

• High flow rate and filtration area

• Compatible with a wide range of chemicals

• Available pre-wetted for aqueous solutions

• Suitable for gas and non-aqueous liquid filtration

• Individually tested for integrity

• Meets SEMI F63 TOC and conductivity standards

• Compliant with FDA non-fiber releasing requirements

Performance Parameters:

• Operating Temperature: 110 °F at 30 psid (43 °C at 2.07 bard)

• Liquid Pressure Rating: 80 psi at 68 °F (5.52 bard at 20 °C)

• Gas Pressure Rating: 60 psi at 68 °F (4.14 bar at 20 °C)

• Reverse Differential Pressure: 50 psid at 68 °F (3.45 bard)

• Recommended Changeout Pressure: 35 psid (2.41 bard)

Sterilization & Sanitization:

• Autoclave: 250 °F (121 °C), 30 minutes, 25+ cycles

• Chemical Sanitization: Compatible with hydrogen peroxide, peracetic acid, sodium hypochlorite, and others

Filtration Area by Length:

• 2" – 1.5 ft² (0.14 m²)

• 5" – 4.1 ft² (0.38 m²)

• 10" – 8.75 ft² (0.81 m²)

• 20" – 17.5 ft² (1.62 m²)

• 30" – 26.25 ft² (2.43 m²)

• 40" – 35.0 ft² (3.24 m²)

Construction Materials:

• Filtration Media: PTFE Membrane

• Support Layers & Housing: Polypropylene

• Sealing Method: Thermal Bonding

• O-Rings (Cartridge Only): Buna, Viton®, EPDM, Silicone, FEP-Encapsulated Silicone, FEP-Encapsulated Viton®

Validated Microbial Retention:
Minimum bubble point values (60% IPA / 40% water):

• 0.05 μm – 43 psig (3.0 barg)

• 0.10 μm – 22 psig (1.5 barg)

• 0.22 μm – 15 psig (1.0 barg)

• 0.45 μm – 9 psig (0.62 barg)

• 1.0 μm – 6 psig (0.41 barg)

• 3.0 μm – 2 psig (0.14 barg)

• 5.0 μm – 1 psig (0.07 barg)

Typical Applications:

• Compressed Air

• Pressurized Gases

• Non-Aqueous Chemicals

• Solvents

• Tank Ventilation

• Point-of-Use Particle Removal